Fabrication of Large-Area Mullite–Cordierite Composite Substrates for Semiconductor Probe Cards and Enhancement of Their Reliability |
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Authors: | Da-Eun Hyun Jwa-Bin Jeon Yeon-Sook Lee Yong-Nam Kim Minkyung Kim Seunghoon Ko Sang-Mo Koo Weon Ho Shin Chulhwan Park Dong-Won Lee Jong-Min Oh |
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Affiliation: | 1.Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; (D.-E.H.); (J.-B.J.); (M.K.); (S.K.); (S.-M.K.); (W.H.S.);2.Material Technology Center, Korea Testing Laboratory, 87 Digital-ro 26-gil, Guro-gu, Seoul 08389, Korea; (Y.-S.L.); (Y.-N.K.);3.Department of Chemical Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea; |
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Abstract: | This work aims to fabricate a large-area ceramic substrate for the application of probe cards. Mullite (M) and cordierite (C), which both have a low thermal expansion coefficient, excellent resistance to thermal shock, and high durability, were selected as starting powders. The mullite–cordierite composites were produced through different composition ratios of starting powders (M:C = 100:0, M:C = 90:10, M:C = 70:30, M:C = 50:50, M:C = 30:70, and M:C = 0:100). The effects of composition ratio and sintering temperature on the density, porosity, thermal expansion coefficient, and flexural strength of the mullite–cordierite composite pellets were investigated. The results showed that the mullite–cordierite composite pellet containing 70 wt% mullite and 30 wt% cordierite sintered at 1350 °C performed exceptionally well. Based on these findings, a large-area mullite–cordierite composite substrate with a diameter of 320 mm for use in semiconductor probe cards was successfully fabricated. Additionally, the changes in sheet resistance and flexural strength were measured to determine the effect of the environmental tests on the large-area substrate such as damp heat and thermal shock. The results indicated that the mullite–cordierite composite substrate was extremely reliable and durable. |
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Keywords: | mullite cordierite composite ceramics environmental tests semiconductor probe cards |
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