X-UV lamellar multilayer amplitude gratings

The concept of X-UV Lamellar Multilayer Amplitude Grating (LMAG) is introduced and a method of fabrication is given. Dynamical and kinematic theories of the diffraction by a LMAG are presented. Different applications of the LMAGs are considered. The first one is the achievement of a narrow bandpass multilayer monochromator for the X-UV domain. The second one is the reduction of specular background in the reflectivity curve of a multilayer structure. The third one is the polychromator system which allows one to split spatially and to perform a spectral sampling of a polychromatic beam. Finally we studied experimentally the behavior of an LMAG in conical mounting.