A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids |
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| Authors: | Kostja Makarovič ,Darko Belavič ,Matjaž Vidmar,Barbara Malič |
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| Affiliation: | 1.KEKO Equipment, Grajski Trg 15, 8360 Ljubljana, Slovenia;2.Jožef Stefan Institute, Jamova Cesta 39, 1000 Ljubljana, Slovenia; (D.B.); (B.M.);3.Centre of Excellence NAMASTE, Jamova Cesta 39, 1000 Ljubljana, Slovenia;4.Faculty of Electrical Engineering, University of Ljubljana, Tržaška Cesta 25, 1000 Ljubljana, Slovenia; |
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| Abstract: | The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 μm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium. |
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| Keywords: | ceramic microsystem microfluidics LTCC RF dielectric heating |
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