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1.
OBJECTIVES: To examine the safety and efficacy of anhydrous crystalline maltose (ACM) for treatment of dry mouth. DESIGN: ACM was delivered orally as a 200-mg lozenge given three times daily over a 12-week (study Alpha) or 24-week (study Omega) period to a total of 22 and 97 subjects, respectively. All participants had prominent complaints of persistent dry mouth associated with primary Sj?gren's syndrome. Patients were examined every 4 weeks in study Alpha and every 6 weeks in study Omega. SETTINGS: Patients were seen in outpatient clinics at a total of 33 sites within the United States. OUTCOME MEASURES: Unstimulated whole saliva output, a measure of basal salivary gland function, was determined at each visit. Symptoms associated with oral and ocular dryness were assessed at the same time with the use of 100-mm visual analog scales. Safety was assessed by physical examination and laboratory studies. RESULTS: During these clinical trials, a majority of subjects demonstrated an increase in unstimulated whole saliva output and the treatment exhibited an excellent safety profile. The ACM treatment in study Omega led to significant improvement in several subjective measures of oral and ocular comfort. CONCLUSIONS: In these two studies, ACM lozenges administered three times daily for 12 or 24 weeks improved salivary output and decreased complaints of dry mouth and eyes. Side effects were minimal, and treatment was without significant adverse events. This safe and simple intervention may provide clinical benefit to individuals with distressing dry mouth symptoms.  相似文献   

2.
Ni–Zn ferrite has important applications in the field of soft magnetic materials due to its excellent magnetic properties, but its high bulk density hinders its promotion. Herein, an oxalate precursor was prepared by a coprecipitation method with metal sulfate and oxalic acid as raw materials. The low density porous Ni–Zn ferrite powder was prepared by thermal decomposition in an aerobic environment with the oxalate precursor. The microstructure, morphology, and dielectric and magnetic properties of Ni–Zn ferrite were studied by thermogravimetric and differential scanning calorimetry, X-ray powder diffraction, X-ray photoelectron spectroscopy, Fourier transform-infrared spectroscopy, scanning electron microscopy, transmission electron microscopy, tap density testing for powder, vibrating sample magnetometry, specific surface and aperture analysis and vector network analysis. The results showed that the purity, morphology, grain size and saturation magnetization of Ni–Zn ferrite were controlled by many factors such as synthetic temperature, retaining time and environmental conditions. Under an oxygen atmosphere, pure Ni–Zn ferrite can be prepared from an oxalate precursor by a thermal process. The ferrite has a wood-splitting appearance and a multi-layered internal cavity structure, and the bulk density is only 1/3 of the general ferrite. It has good soft magnetic and microwave absorbing properties, which makes it a potential excellent material for microwave absorbers.

Ni–Zn ferrite has important applications in the field of soft magnetic materials due to its excellent magnetic properties, but its high bulk density hinders its promotion.  相似文献   

3.
We synthesized self-assembled nucleobases (SANs), such as 1-dodecylthymine (DOT) or 9-dodecyladenine (DOA), in which the nucleobase is immobilized on a long alkyl chain. The thermal stability of the SAN was increased by mixing with the acidic surfactant mono-dodecyl phosphate (MDP). Additionally, the SAN–MDP composite material showed proton conductivity of 4.62 × 10−4 S cm−1 at 160 °C under anhydrous conditions. Additionally, the activation energy of the proton conduction was approximately 0.2 eV and this value was one order of magnitude higher than that of a typical humidified perfluorinated membrane, in which the proton can be moved by vehicle molecules, such as water molecules. In contrast, when the nucleobase without the immobilization of a long alkyl chain was mixed with MDP, the proton conductivity of these composite materials was two orders of magnitude less than that of the SAN–MDP composite. Therefore, we measured the XRD spectra of the SAN–MDP composite material. As a result, the SAN–MDP composite material showed a self-assembled structure with a two-dimensional proton conducting pathway, such as a lamellar structure, and that the anhydrous proton conduction was related to the interaction between the nucleobase of the SAN and the phosphate group of MDP. Consequently, the self-assembled nucleobase derivatives have the potential for use as novel anhydrous proton conductors with a two-dimensional proton conducting pathway.

We synthesized the proton conductive self-assembled nucleobase, such as 1-dodecylthymine and 9-dodecyladenine, in which the nucleobase is immobilized on a long alkyl chain.  相似文献   

4.
To overcome the environmental challenges caused by utilization of fossil fuel based energy technologies and to utilize the full potential of renewable energy sources such as solar, wind and tidal, high power and high energy density containing large scale electrochemical energy storage devices are a matter of concern and a need of the hour. Pseudocapacitors with accessibility to multiple oxidation states for redox charge transfer can achieve a higher degree of energy storage density compared to electric double layer capacitors (EDLC) and the hybrid supercapacitor is one of the prominent electrochemical capacitors that can resolve the low energy density issues associated with EDLCs. Due to its open pore framework structure with superior structural stability and accessibility of Co2+/3+/4 redox states, porous anhydrous CoC2O4 nanorods are envisaged here as a potential energy storage electrode in a pseudo-capacitive mode. Superior specific capacitance equivalent to 2116 F g−1 at 1 A g−1 in the potential window of 0.3 V was observed for anhydrous CoC2O4 nanorods in aqueous 2 M KOH electrolyte. A predominant pseudo-capacitive mechanism seems to be operative behind the high charge storage at electrodes as intercalative (Inner) and surface (outer) charge storage contributions were found to be 75% and 25% respectively. Further, in full cell asymmetric supercapacitor (ASC) mode in which porous anhydrous CoC2O4 nanorods were used as positive electrodes and activated carbon (AC) was utilised as negative electrodes within an operating potential window of 1.3 V, a highest specific energy of W h kg−1 and specific power of ∼647 W kg−1 at 0.5 A g−1 current density were obtained with superior cycling stability. High cycling stability coupled with superior electrochemical storage properties make anhydrous CoC2O4 nanorods potential pseudo-capacitive electrodes for large scale energy storage applications.

With active participation of Co2+/3+ redox couples in an oxalate framework, Anhydrous CoC2O4 nanorods display a capacitance equivalent to 2116 F g−1 at 1 A g−1 current rate in the potential window of 0.3 V in aqueous 2 M KOH electrolyte.  相似文献   

5.
6.
The carboxylated poly[3,3-bis(3-azidomethyl)oxetane] (PBAMO) copolymers (poly(BAMO-carboxylate)) were synthesized by substitution of poly[3,3-bis(3-chloromethyl)oxetane] (PBCMO) with potassium carboxylate and sodium azide in DMSO. The synthesized compounds were characterized using various analytical techniques, such as Fourier-transform infrared (FT-IR) spectroscopy, inverse-gated decoupling 13C-nuclear magnetic resonance (13C NMR) spectroscopy, gel permeation chromatography (GPC), thermogravimetric analysis (TGA), differential scanning calorimetry (DSC), calorimetry, friction, and impact sensitivity analysis. These poly(BAMO-carboxylate) compounds have better thermal properties, with lower glass transition temperatures (ranging from −43 °C to −51 °C) than PBAMO (−37 °C) and higher thermal decomposition temperatures (233–237 °C) than PBAMO (211 °C). Moreover, poly(BAMO0.80-octanoate0.20) and poly(BAMO0.78-decanoate0.22) have higher heats of combustion (5226 and 5665 kJ mol−1, respectively) and negative formation enthalpies (−0.17 and −0.55 kJ g−1, respectively), while PBAMO has lower heat of combustion (3125 kJ mol−1) and positive formation enthalpy (0.06 kJ g−1). The poly(BAMO-carboxylate) compounds have higher values (38–50 J) than that of PBAMO (14 J) in the impact sensitivities. This is a valuable study for improving the properties of PBAMO, which is a high energetic polymeric binder but difficult to handle because of its sensitivity. Therefore, poly(BAMO-carboxylate) could be a good candidate as a prepolymer for designing the energetic polymeric binder.

The carboxylated poly[3,3-bis(3-azidomethyl)oxetane] (PBAMO) copolymers (poly(BAMO-carboxylate)) were synthesized by substitution of poly[3,3-bis(3-chloromethyl)oxetane] (PBCMO) with potassium carboxylate and sodium azide in DMSO.  相似文献   

7.
Zirconia supported vacant phosphotungstate stabilized Pd nanoparticles (Pd–PW11/ZrO2) were prepared using a simple impregnation and post reduction method, characterized and their efficiency for selective C Created by potrace 1.16, written by Peter Selinger 2001-2019 C hydrogenation of unsaturated compounds explored. The establishment of a hydrogenation strategy at low temperature using water as solvent under mild conditions makes the present system environmentally benign and green. The catalyst shows outstanding activity (96% conversion) with just a small amount of Pd(0) (0.0034 mol%) with high substrate/catalyst ratio (29 177/1), TON (28 010) and TOF (14 005 h−1) for cyclohexene (as a model substrate) hydrogenation. The catalyst was recovered by simple centrifugation and reused for up to five catalytic cycles without alteration in its activity. The present catalyst was found to be viable towards different substrates with excellent activity and TON (18 000 to 28 800). A study on the effect of addenda atom shows that the efficiency of the catalyst can be enhanced greatly by increasing the number of counter protons. This challenging strategy would greatly benefit sustainable development in chemistry as it diminishes the use of organic solvents and offers economic and environmental benefits as water is cheap and non-toxic.

Zirconia supported vacant phosphotungstate stabilized Pd nanoparticles (Pd–PW11/ZrO2) are proved to be sustainable and excellent for the water mediated hydrogenation reaction with a very high substrate to catalyst ratio, TON and TOF.  相似文献   

8.
Three new Pt complexes, [PtCl2(N(SO2(2-nap))dpa)], [PtCl2(N(SO2(1-nap))dpa)] and [PtCl2(N(SO2pip)dpa)], containing a rare 8-membered ring were synthesized in good yield and high purity by utilizing the ligands N(SO2(2-nap))dpa, N(SO2(1-nap))dpa and N(SO2pip)dpa, which contain a dipicolylamine moiety. Structural studies of all three complexes confirmed that the ligands are bound in a bidentate mode via Pt–N(pyridyl) bonds forming a rare 8-membered ring. The intense fluorescence displayed by the ligands is quenched upon coordination to Pt. According to time dependent density functional theory (TDDFT) calculations, the key excitations of N(SO2(2-nap))dpa and [PtCl2(N(SO2(1-nap))dpa)] involve the 2-nap-ligand-centered π → π* excitations. While all six compounds have shown antiproliferative activity against human breast cancer cells (MCF-7), the N(SO2pip)dpa and N(SO2(2-nap))dpa ligands and [PtCl2((NSO2pip)dpa)] complex have shown significantly high cytotoxicity, directing them to be further investigated as potential anti-cancer drug leads.

Three new Pt complexes, [PtCl2(N(SO2(2-nap))dpa)], [PtCl2(N(SO2(1-nap))dpa)] and [PtCl2(N(SO2pip)dpa)], containing a rare 8-membered ring were synthesized in good yield and high purity by utilizing ligands which contain a dipicolylamine moiety.  相似文献   

9.
Hydroxyl-terminated telechelic polyisobutylene (PIB) was prepared through living cationic polymerization. A living PIB chain was formed using the t-Bu-m-DiCuOMe/TiCl4 initiating system and then capped with 1,3-butadiene (BD) to prepare chlorine-terminated telechelic PIB. The chlorine-terminated telechelic PIB was then hydrolysed with tetrabutylammonium hydroxide to form hydroxyl-terminated PIB. Nuclear magnetic resonance spectroscopy confirmed hydrolysis completion. The hydroxyl-terminated PIB was subsequently used as a diol to react with 4,4-methylenebis(phenylisocyanate) (MDI) and produce a PIB-based polyurethane, which showed stronger acid resistance, hydrolysis stability and thermal oxidation stability than a commercial polyurethane.

We synthesised hydroxyl-terminated PIB through living cationic polymerisation. Then the hydroxyl-terminated PIB was subsequently used as a diol to produce a PIB-based polyurethane.  相似文献   

10.
Leach test of a phosphate controlled release glass (CRG) were conducted in aqueous medium under different conditions. Results show that the phosphate CRG dissolves congruently in deionized water. Its dissolution rate is dependent with the solution pH, temperature and concentrations of phosphate ions and calcium ions in the medium, but independent with the stirring speed of the solution. Analysis leads to a conclusion that the dissolution of phosphate glass is a reaction-controlled process. Discussions on the dissolution mechanisms show that the nature of the reaction in the hydrated layer is the dissociation of Na(+) ions from the phosphate chains under the attack of the penetrating water molecules. The velocity of formation and development of hydrated layer depends on the diffusion rate of water molecules inside glass. The dissolution is realized by the breakage of P-O-P bonds in the phosphate network within the hydrated layer. The chelating ability of polyphosphate with divalent cations play an important role in the dissolution process of phosphate CRGs and was found responsible for the accelerated or decelerated dissolution of the CRG in sodium hexametaphosphate (SHMP) or CaCl(2) solutions, respectively.  相似文献   

11.
背景:壳聚糖和介孔生物玻璃都具有良好的生物相容性和止血性能,但壳聚糖止血作用有限,介孔生物玻璃粉体方式止血,给应用带来不便。目的:制备壳聚糖/介孔生物玻璃复合多孔膜并检测材料的性能。方法:采用冷冻干燥法制备壳聚糖/介孔生物玻璃复合多孔膜。结果与结论:通过冷冻干燥法可以实现壳聚糖和介孔生物玻璃的均匀复合。制备的复合多孔膜的孔隙分布较均匀;多孔膜具有很好的吸水性,吸水率的大小与壳聚糖和介孔生物玻璃质量比相关;多孔膜的孔隙率高。  相似文献   

12.
背景:壳聚糖和介孔生物玻璃都具有良好的生物相容性和止血性能,但壳聚糖止血作用有限,介孔生物玻璃粉体方式止血,给应用带来不便。目的:制备壳聚糖/介孔生物玻璃复合多孔膜并检测材料的性能。方法:采用冷冻干燥法制备壳聚糖/介孔生物玻璃复合多孔膜。结果与结论:通过冷冻干燥法可以实现壳聚糖和介孔生物玻璃的均匀复合。制备的复合多孔膜的孔隙分布较均匀;多孔膜具有很好的吸水性,吸水率的大小与壳聚糖和介孔生物玻璃质量比相关;多孔膜的孔隙率高。  相似文献   

13.
LaFeO3 nanospheres with an orthorhombic perovskite structure were synthesized by a sol–gel autocombustion method in the presence of different citric acid ratios (x = 2, 4, 8, and 16) and utilized for the photocatalytic conversion of o-aminophenol (OAP) to 2-aminophenoxazine-3-one (APX) for the first time. OAP is one of the most toxic phenolic derivatives used as a starting material in many industries; however, the dimerization product APX has diverse therapeutic properties. Photocatalytic conversion was carried out in ethanol/water and acetonitrile/water mixtures in the absence and presence of molecular oxygen at ambient temperature via the oxidative coupling reaction that mimics phenoxazinone synthase-like activity. The LaFeO3 samples showed a superior photocatalytic activity of OAP to APX with rate constants of 0.43 and 0.92 min−1 in the absence and presence of molecular oxygen, respectively. Thus, the LaFeO3 nanozymes could be used as promising candidates in industrial water treatment and phenoxazinone synthase-like activity.

LaFeO3 nanospheres were synthesized by a facile sol–gel autocombustion method and explored for the photocatalytic transformation of o-aminophenol to 2-aminophenoxazine-3-one.  相似文献   

14.
Nanoceria (cerium oxide nanoparticles: CeO2-NPs) has received significant attention due to its biocompatibility, good conductivity, and the ability to transfer oxygen. Nanoceria has been widely used to develop electrochemical sensors and biosensors as it could increase response time, sensitivity, and stability of the sensor. In this review, we discussed synthesis methods, and the recent applications employing CeO2-NPs for electrochemical detection of various analytes reported in the most recent four years.

Nanoceria (cerium oxide nanoparticles: CeO2-NPs) has received significant attention due to its biocompatibility, good conductivity, and the ability to transfer oxygen.  相似文献   

15.
A comb-shaped copolymer of 2-acrylamide-2-methyl propane sulfonic acid (AMPS), allyl polyoxyethylene ether (APEG), N-vinyl-2-pyrrolidone (NVP) and sodium styrene sulfonate (SSS) was synthesized by free-radical polymerization. The structure of the comb-shaped copolymer was characterized by Fourier transform infrared (FTIR) spectroscopy, and its molecular weight was determined by gel permeation chromatography (GPC). FTIR measurements and environmental scanning electron microscopy (ESEM) analysis were used to characterize the working mechanism of different filtrate loss reducers. Thermogravimetry and differential scanning calorimetry (TG-DSC) results showed that thermal degradation of the copolymer was significant only after 295.24 °C. The comb-shaped copolymer helped reduce filtration, while maintaining the rheological properties of the drilling fluid at high temperature and high salinity conditions as long PEG chains sterically stabilized colloids by protruding into the suspension. The filtration control of the comb-shaped copolymer was comparable to that of the sulfonated phenolic resin (SMP) mixture and outperformed AM/AMPS/NVP/SSS (NS-1) and polymeric product PAC in terms of high-temperature resistance and rheological advantages. The morphology of the comb-shaped copolymer was found with a compact 3-D film structure due to the intramolecular and intermolecular association by hydrogen bonding in the side chains. Small curly debris at high temperature and salinity remained capable of filtration control. The NS-1 had a lower temperature resistance, as large areas of flaky films thermally degraded into a small chain structure at 180 °C. Only separated filiform and coarse lines were found in PAC with a linear structure that makes the drilling fluid more viscous. Compact and structured films were formed with the SMP mixture at high temperature and salinity.

Comb-shaped copolymer as filtration reducer for high temperature and high salinity.  相似文献   

16.
Palladium is a versatile catalyst, but the synthesis of palladium nanoparticles (PdNPs) is usually attained at a high temperature in the range of 160 °C to 200 °C using toxic reducing agents such as sodium borohydride. We report the synthesis of PdNPs using a low-cost and environmentally-friendly route at ambient temperatures. Quercetin diphosphate (QDP), a naturally-derived flavonoid, was employed as a reducing, capping, and stabilizing agent. The effect of temperature was optimized to produce perfectly spherical PdNP nanoparticles with sizes ranging from 0.1 to 0.3 microns in diameter. At relatively higher concentration of QDP, significantly smaller particles were produced with a size distribution of 1–7 nm. Perfectly spherical PdNP nanoparticles are a rare occurrence, especially under ambient room temperature conditions with fast reaction time. The formation of the nanoparticles was confirmed using UV-vis, TEM, EDS, and XRD. HRTEM demonstrated the lattice structure of the PdNPs. The synthesized PdNPs were also tested for their antifungal properties against Colletotrichum gloeosporioides and Fusarium oxysporum. Results showed that the size of the PdNPs played a critical role in their antifungal activity. However, for F. oxysporum, other factors beyond size could affect the antifungal activity including fine-scale, nutrient composition, and target organisms.

Palladium is a versatile catalyst, but the synthesis of palladium nanoparticles (PdNPs) is usually attained at a high temperature in the range of 160 °C to 200 °C using toxic reducing agents such as sodium borohydride.  相似文献   

17.
Phosphorylated biopolymers can induce mineralization, mimic the process of natural bone formation, and have the potential as scaffolds for bone tissue engineering. 2-Methacryloyloxyethyl phosphorylcholine (MPC), a low cytotoxicity phosphorus source, is mainly applied in vascularization and promoting blood compatibility and has been less researched for bone repair. In this study, phosphorylated methacrylamide chitosan (PMAC) hydrogel was prepared by mixing methacrylamide chitosan (MAC) and different mass of MPC with photoinitiator under UV irradiation. A series characterization tests showed that PMAC hydrogels were successful prepared and had a pretty good mineralization ability. Moreover, human fetal osteoblastic (hFOB) cells cultured on PMAC hydrogels exhibited not only highly viability but also the enhanced ALP activity and calcium deposition. The PMAC hydrogels have great potential in bone tissue engineering applications.

Phosphorylated biopolymers can induce mineralization, mimic the process of natural bone formation, and have the potential as scaffolds for bone tissue engineering.  相似文献   

18.
Polybenzoxazines with molecular design flexibility have excellent properties by using suitable raw materials. A new benzoxazine monomer terephthalic acid bis-[2-(6-methyl-4H-benzo[e][1,3]oxazin-3-yl)]ethyl ester (TMBE) with bis-ester groups has been synthesized from the simple esterification reaction of terephthaloyl chloride and 2-(6-methyl-4H-benzo[e][1,3]oxazin-3-yl)-ethanol (MB-OH). The chemical structure of TMBE was characterized by Fourier transform infrared spectroscopy (FT-IR) and nuclear magnetic resonance spectroscopy (1H-NMR, 13C-NMR). Polymerization behavior of TMBE was studied by differential scanning calorimetry (DSC) and FT-IR after each cure stage. The cross-linked polybenzoxazine (PTMBE) gave a transparent film through the thermal casting method. The dynamic mechanical analysis of PTMBE showed that the Tg was 110 °C. Thermogravimetric analysis reveals better thermal stability as evidenced by the 5% and 10% weight-loss temperatures (Td5 and Td10) of PTMBE, which were 263 and 289 °C, respectively, with a char yield of 27% at 800 °C. The tensile test of the film revealed that the elongation at break was up to 14.2%.

A novel benzoxazine monomer contain ester group was obtained by an indirect molecular design method. Its polymer showed excellent flexibility.  相似文献   

19.
Hierarchical nano-ZSM-5 zeolites (Z5-X) with different grain sizes were synthesized by varying amounts of 3-glycidoxypropyltrimethoxysilane (KH-560) in the hydrothermal synthesis strategy. Moreover, the conventional ZSM-5zeolite(Z5), which was prepared without KH-560, was used as the reference sample. The crystalline phases, morphologies, porous characteristics, Si/Al molar ratios and acidic properties of all fresh catalysts were characterized using the X-ray diffraction (XRD), Fourier transform infrared spectra (FT-IR), scanning electron microscopy (SEM), N2 adsorption–desorption, inductively coupled plasma atomic emission spectroscopy (ICP) and temperature programmed desorption of ammonia (NH3-TPD) techniques. Results show that the grain size and strong acid amount of zeolite decreased with the increasing amount of KH-560. The micropore surface areas and the corresponding volume of Z5-X changed less compared with Z5. Consequently, the high shape-selectivity of zeolite was preserved well under the addition of KH-560. However, the mesopore surface areas and the corresponding volume increased significantly with the increasing amount of KH-560. Benefiting from the abundant hierarchical structure, the Z5-X catalysts exhibited a larger coke capacity than the Z5 catalyst. The coke depositions of all the deactivated catalysts were characterized by the thermogravimetric technique (TG), and the results are indicative of the decreased average rate of coke deposition with an increasing amount of KH-560, which could result from the gradually reduced strong acid amount and the nano-sized crystallites. The catalytic performance of methanol-to-aromatics (MTA) indicates that the Z5-0.12 catalyst exhibited higher catalytic activity and selectivity of BTX as the reaction was prolonged, which could result from the synergistic effect among the proper strong acid amount, the smaller zeolite grain size, and the abundant hierarchical structure.

The crystal size and strong acid amounts of ZSM-5 decrease and the mesopores increase with increasing of KH-560. High MTA catalytic performance could be obtained under synergistic effect of proper strong acid amount, smaller crystal size and abundant hierarchical structure.  相似文献   

20.
Here, we show the easy-handling of a liquid gallium–tin alloy (Ga : Sn) as a laser target source for 13.5 nm light generation. The alloys have ∼30 °C freezing points according to a differential scanning calorimetry cooling process. A Nd:YAG laser (1064 nm, 1 ns, 7.1 × 1010 W cm−2) ablated the alloys, obtaining a similar extreme ultraviolet emission intensity to Sn despite a small quantity of Sn. Finally, we demonstrate a liquid metal alloy jet and droplets using a plastic nozzle for high-repetition target supply.

We show the near-room-temperature-handling of a liquid gallium–tin alloy (Ga:Sn) as a laser target source for 13.5 nm pulse repetition.

Liquid metals have generated interest in relation to electronics due to the possibilities of producing flexible circuitry, moldable parts, and stretchable electrodes.1 Liquid metals can dissolve other metal ions, often further lowering the melting point through bond disruption.1b In particular, gallium has shown strong potential as it exists readily in a liquid state at room temperature, with a non-oxygenated bulk and non-toxic properties. For example, gallium-based catalysts are exciting in terms of CO2 reduction.1cA cruder, but no less interesting, way of using liquid metals is in laser plasma generation. Laser plasma sources are of interest in fields such as extreme ultraviolet lithography (EUVL) and quantum beam generation.2 EUVL generation is a process whereby a material, typically tin, is heated by a high-intensity laser pulse to ∼100 eV. The energy losses from the laser pulse (IL) are excess heating to high ionization (Iion), greater kinetic energy of ions and electrons (Ikin), and out-of-band radiation (Ioobrad) as follows:2eIL = Ikin + Iion + Irad + Ioobrad1In order to obtain the most favorable wavelength of 13.5 nm for the lithography optics, tin is the best element with the highest Irad under optimized conditions.2eThe light produced by this heating will be applied in the high volume manufacturing of semiconductors as a lithographic process. Currently, commercial EUVL sources are supplied as a test tool for lithography; powers at the intermediate focus are ever increasing (>125 W), and the source is highly available (>80%).3 However, more is needed from EUVL sources due to the need for higher throughput.4 Furthermore, practical issues remain problematic, such as the durability issue of the reflective optics.4,5In addition to EUVL, compact EUV sources with different target sources, such as gas puff targets6 and low-density materials,7 are becoming attractive. These sources should be low cost, allowing exploration of different applications such as surface modification of materials8 and time-resolved ultraviolet photoelectron spectroscopy (UPS) studies, etc. By combining high-power laser compactness9 and emerging target materials and technologies,7e,10 reliable quantum beam sources can be developed. Overall, laser plasma target materials play an important role in producing very high temperature plasmas, X-ray and higher quantum beam emission.To date, many works have focused on the technical optimization of EUV, such as the laser and target parameters.10,11 However, optimizing the target source could be just as beneficial for EUV and other laser plasma sources; for example clever target design can improve laser conversion efficiency (CE).11f This area is firmly established with the chemical synthesis of these low-density targets.7f,10,11b,11f The plasma generated from well-defined low-density targets have lower self-reabsorption than full-density targets.11a Dilution of tin is also an effective method for obtaining a high CE by-polymer,11d and lithium dilution.11f One criticism of minimum mass and well-defined low-density targets is that large laser systems would require a substantial design modification in order to be accommodated. However, an alternative dilution by a liquid metal droplet source would not suffer the same issues as liquid tin. This could be easily adapted to existing EUV design protocols, and should be considered for larger laser plasma sources. Furthermore, construction of new generations of EUV sources based on a low melting point liquid alloy would be simpler than liquid tin. Low melting point metals such as gallium or indium have caught the interest of EUV researchers.12 One alloy that heavily utilizes gallium, commercially known as Galinstan®, is typically composed of Ga (62–95%), In (5–22%) and Sn (0–16%), and has a strong emission of 13.5 nm light due to the presence of Sn.12a Therefore, Galinstan® could be highly desirable as a target source for EUVL given the very low reported melting point of −19 °C. However, low CE and the broad and flat shaped EUV spectrum due to the presence of indium (∼15/16 nm) and gallium (∼11/12 nm) restricts Galinstan® to metrology applications.12b For EUV, the choice between utilization of gallium or indium is a decision for researchers. Such as a 50 : 50% Sn : In alloy has the same density as liquid Sn, and a melting point of ∼155 °C.13 On the other hand, gallium has a lower melting point than indium, meaning that alloys of gallium–tin could remain liquid at temperatures less than 100 °C. Although gallium has been mentioned on patents,14 there is a lack of accessible experimental data to assess the viability of gallium alloys as an EUV source.The aim of this work was to demonstrate that Ga : Sn alloys are an easy-handling liquid metal alternative to Sn as a laser plasma target source. Ga : Sn alloys of differing atomic (at%) ratios were synthesized, then characterized using differential scanning calorimetry (DSC) and scanning electron microscopy (SEM) with X-ray dispersive spectroscopy (EDS). A Nd:YAG laser (1 ns, 2 mJ) was used to generated EUV under similar conditions to previous work,15 with a grazing incidence spectrometer (GIS). As an example, we show that EUV emission intensity for the Ga : Sn alloy was equal to bulk Sn, depending on the alloy composition. The CE for the Ga : Sn alloy was also estimated in comparison with bulk tin using a calorimeter. We also show the emission properties of the alloy irradiated by 10 Hz exposure in order to demonstrate the potential as a practical and flexible laser plasma target source. Finally, our progress developing Ga : Sn jets and droplets is shown.DSC data shown in Fig. S1–S4 exhibit consistency with the phase diagram reported;16 the endothermic peak on the liquidus and exothermic peaks at the solidus (27 °C), and supercooling solidus from the metastable state (–25 °C) are shown in
Ga : Sn compositionMelting point (°C)Freezing point (°C)CE (%)
Atomic% preparedAtomic% ratio measured by EDS
0 : 100N/A232a1.31.3
100 : 0N/A29a0.50.5
90 : 1090 : 10 ± 222−90.8
80 : 2089 : 11b ± 23060, −251.0
70 : 3074 : 26 ± 33080, −251.3
60 : 4066 : 34 ± 43090, −251.3
Open in a separate windowaLiterature value.bEDS mapping struggled to correlate well to the prepared atomic percentage, however the EUV data suggested the correct composition was obtained.In order to utilize the alloy as a laser target, more detailed characterization is necessary, such as the microstructure of the metastable phase and stability. SEM was used to image the 10 at% Ga : Sn alloy surface structure, while the EDS probe measured the elemental composition (at%). SEM revealed the globular alloy microstructure (Fig. 1), which appeared as a distinctive light (tin) and dark (gallium) spotted pattern. More examples of such architectural features can be found in the ESI. The island-sea-like globular microstructure of the alloy is one of several typical structures formed by alloys. Here, the globular structure is composed of heterogeneous sized ‘islands’ of tin surrounded by a gallium ‘sea’. These tin ‘islands’ typically vary from 20 μm to 200 μm in diameter. We were required to apply additional carbon tape to image the lower tin at% containing alloys due to electron beam charge up, and difficulties associated with imaging semi-molten samples.Open in a separate windowFig. 1SEM image (left) and EDS maps (Ga, middle and Sn, right) from a Ga : Sn = 90 : 10 at% alloy on a glass substrate. The globule islands are composed of tin, surrounded by gallium. Unlike the SEM images, the lighter grey patterning represents the element measured by the EDS probe in each case.From the phase diagram, the SEM images at room temperature (Fig. S5–S8) are characterized as eutectic phases with an island-sea structure. On the whole, the alloys were in a metastable semi-molten state on the surface of the glass substrate at 25 °C. The molten alloy was easy to handle, and unreactive in air. This is because of the properties of the mother metals, which is an attractive quality of the alloy. Furthermore, the sub 100 °C melting point meant that plastic nozzles could be used for the injection systems. For high-repetition (kHz) EUV generation, a further study examining the alloy debris properties is pertinent.The EDS probe revealed the elemental at% composition, which is consistent with the ratio of Sn and Ga (Fig. S9–S12 and Fig. 2).Open in a separate windowFig. 2Spectra overlay of the relative EUV emission intensities of the Ga : Sn alloys and reference metals ablated using a laser intensity of 7.1 × 1010 W cm−2. Fig. 2 shows the overlaid EUV spectra for all the Ga–Sn alloys, and Sn and Ga reference metals. Tin EUV emissions have been described as an unresolved transmission array (UTA) from Sn8+ to Sn21+ from 4d–4f transmissions.17 Gallium UTA emission in the 13.5 nm region arises from Ga8+ to Ga11+ from 3p–3d transitions, and 3d–4p transitions of Ga8+.12a In the case of the Ga : Sn alloys, a large UTA across 11–15 nm was observed with a distinctive peak at 13.5 nm arising from tin transmissions, as detailed above.The emission intensity at 13.5 nm reached a plateau at 30% tin content, as shown in Fig. S13. We confirmed this by observing that there was very little difference between the intensities of 30% and 40% Sn content and bulk Sn. The Ga EUV emissions for the alloys containing 30% and 40% tin can still be seen in the ∼11–13 nm region. This established that the alloys were ablated in the alloyed region instead of a tin island, which we would expect to be devoid of strong Ga emissions.The increasing intensity of the peak at 13.5 nm as the tin content increased was an expected trend. Based on this, we anticipated that a feasible EUV source could be composed of a Ga : Sn alloy with as low as 30–40% Sn content. This alloy would also have the advantage of keeping the liquid metal target source at around 40 °C. On the other hand, gallium metal had a significantly lower CE at 13.5 nm (0.5% vs. 1.3% Sn). This was expected given the low relative intensity of the emission at 13.5 nm 2% bandwidth. We did not investigate alloys with more than 50% tin content due to the increasing melting point, without corresponding increases in the EUV intensity at 13.5 nm.We were concerned with the ‘island-sea’ heterogeneity of the alloys, not only the SEM images but also in generating EUV. Developing a low melting point alloy with inconsistent EUV emission properties would not be practical. Generally, alloy heterogeneity was not an issue we encountered, but it was possible to obtain such inconsistent emission intensities after trial and error (Fig. 3(a) and (b)). In each case, the spectrum was dominated by one metal rather than emission properties from both metals. For the gallium-dominated emission (Fig. 3(a)), there was still a distinctive emission at 13.5 nm which can be attributed to the solvated tin atoms present (0–10% at% Sn content) in the gallium. We considered that the laser spot ablated a very small alloyed region. The tin-dominated spectra (Fig. 3(b)) had a strong emission around 13.5 nm due to large volume of tin ablated. To further test the alloy, we performed 10 Hz exposure experiments using an auto-stage to ablate the fresh alloy during laser exposure (Fig. 3(c)). The resulting EUV emission was more representative of the higher tin content alloys rather than ablating a large region of a single metal. We confirmed the location of the 10 Hz emission by SEM (Fig. 4). The laser spot encompassed the alloyed region of the alloy, deforming the surface approximately to the diameter of the laser spot size. The consistency of the 10 Hz emission was encouraging for higher repetition EUV emission. A refined synthesis of the alloy would reduce any inconsistency relating to emission intensity. This would therefore retain high-power output at the intermediate focus, while retaining a sub 100 °C melting point.Open in a separate windowFig. 3Single shot EUV emission of a Ga : Sn alloy in two different locations (a) and (b), and a 10 Hz emission (c) of the same target. An auto-stage was used to ensure fresh target was ablated during a 10 Hz exposure at 2.5 × 1010 W cm−2. The shifting speed of the target was 2 mm s−1.Open in a separate windowFig. 4SEM micrograph of the ablation trace on a Ga : Sn alloy using 10 Hz exposure from a Nd:YAG laser region.Alloy oxidation generally was an issue for EUV generation, even though oxidation occurs after sample preparation from the surface.11f,15 Oxygen has a characteristic EUV peak at 17 nm, that only grows with increasing Sn content (Fig. 2). In fact, this peak was not observed during the 10 Hz experiments. Perhaps the gallium oxide layer was significantly thinner than tin oxide, and thus did not affect EUV generation until higher Sn content was reached.Although the reduced melting point is a step forward for handling the alloy target source, SEM revealed that all alloys had a heterogeneous globular structure. Our concern for this alloy as an EUV light source material stems from its practical use. For example, producing inconsistent power at the intermediate focus due to ablation of larger amounts of one metal in the alloy is very undesirable. Exploring improved synthesis processes to produce a more homogeneous globular structure would be highly attractive. Finally, we used a polytetrafluoroethylene (PTFE) nozzle (inner diameter of 150 μm) and syringe pump to produce Ga : Sn droplets or a liquid Ga : Sn jet. To achieve Ga : Sn droplets or a jet we controlled the pump rate of the apparatus between 1.1 mL min−1 and 2 mL min−1, respectively (Fig. 5). This is an important aspect of laser plasma generation, especially where requirements range from Hz to kHz speeds, depending on the application.3 Ablation of alloy droplets could suit slower repetition rates, whereas a jet could satisfy higher repetition needs. From a practical perspective, PTFE nozzles were necessary due to gallium amalgam chemistry. Amalgamation of common metal nozzles such as aluminum could risk damage to the nozzle, or target supply contamination with the amalgamated metal. Moreover, the low melting point of the alloys opened up the possibility of using plastic components. This is difficult currently due to the high temperature required for maintaining liquid tin (232 °C). This could be attractive on a more industrial scale for laser plasma generation.Open in a separate windowFig. 5CCD camera images of Ga : Sn capturing below 100 mm of a syringe containing the Ga : Sn (a) at 10 °C and (b) at 30 °C. The exposure time was 0.1 ms and the duration among the image was 10 ms for (b). The nozzle of the syringe was PTFE with inner and outer diameters of 150 μm and 760 μm, respectively.In summary, we showed that liquid metal Ga : Sn alloys are promising as a laser plasma target source. The Ga : Sn alloys have a wide metastable temperature region when compared with liquid tin (>30 °C vs. > 232 °C). An area of future focus would be to reduce alloy eutectic issues that could affect performance as a source of EUV light. By selecting the alloy ratio, we could obtain the EUV emission properties without significant loss of performance compared with bulk tin. Our data indicated that 30 at% content was necessary for an estimated melting point of ∼30 °C and CE of 1.3% (vs. 1.3% bulk tin), striking an ideal balance between the two metals. We performed 10 Hz exposures, and plastic nozzle injection tests demonstrated the potential for this material from a practical point of view as a laser plasma target source for quantum beam sources.  相似文献   

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