柔性PET衬底上ZnO薄膜的制备、电学性质及激光辐照效应

室温下采用中频反应磁控溅射技术在柔性PET（Polyethylene terephthalate）衬底上沉积了ZnO薄膜。研究了溅射功率和氩氧流量比对薄膜电学性质的影响，获得室温沉积柔性ZnO薄膜的优化工艺条件为溅射功率20 W和氩氧流量比1：1。采用不同能量密度的激光辐照，有效改善了柔性ZnO薄膜的晶体结构和电学性能。原子力显微镜（AFM）和X射线衍射（XRD）测试结果显示，激光辐照可使薄膜表面ZnO颗粒产生团聚融合，并在（100）和（101）晶面上产生明显的取向生长，薄膜由非晶转为多晶结构。Hall性质的研究结果表明，激光辐照可有效提高ZnO薄膜的载流子浓度，降低电阻率，改善室温沉积柔性ZnO薄膜导电性能。

Electrical Properties of ZnO Thin Films Deposited on Flexible PET Substrate and Effect of Laser Irradiation

Zinc oxide (ZnO) films were deposited on flexible PET substrates by intermediate frequency reaction magnetron sputtering method at room temperature.The effects of sputtering power and flow ratio of F (Ar/O₂) on the electrical properties of ZnO films were investigated,and the optimum sputtering power and F (Ar/O₂) was 20 W and 1:1,respectively.Laser irradiation was found to be more effective both for the modification of the surface morphology,crystal structure and for the improvement of the electrical properties of the as-grown flexible ZnO thin films.X-ray diffraction (XRD) and atomic force microscope (AFM) measurements showed that the as-grown films had a relative smooth and dense surface morphology and an amorphous structure.The irradiation treatment improves the crystalline quality of the flexible ZnO thin films through promoting the aggregation of the ZnO grains and enhancing the (100) and (101) orientation.A significant increase in the carrier concentration and a decrease in the resistivity of the films were observed after laser irradiation.