喷砂预处理钛合金表面类金刚石薄膜的制备及性能研究

目的利用等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition,PECVD)技术,在不同粗糙度医用钛合金表面制备类金刚石薄膜(diamond-like carbon film,DLC),并对类金刚石薄膜的膜-基结合力、电化学腐蚀行为及生物学行为进行研究,探索基底材料喷砂预处理对于表面制备的类金刚石薄膜是否是一种有效改性方法。方法通过不同粒度的Al2O3在一定条件下喷砂钛合金表面,制备出不同粗糙度表面的钛合金片,采用PECVD技术在其表面制备类金刚石薄膜。通过扫描电子显微镜、X-射线光电子能谱仪、拉曼光谱仪、接触角测量仪、表面性能测试仪和电化学方法检测各组样品的物理化学性能表征;利用MTT比色法、荧光染色法进行薄膜表面生物学行为的评价。结果将DLC沉积在喷砂预处理的钛合金表面,可以明显增强类金刚石的膜-基结合力,最高达到45N;耐腐蚀性研究中,表面沉积DLC的钛合金实验组腐蚀电位均正向大于未沉积DLC的钛合金组(P0.05);生物学行为研究中,在60#Al2O3喷砂处理钛合金表面沉积DLC的S60实验组细胞增殖状况最佳,明显大于未喷砂S0组(P0.05)。结论将钛合金基底喷砂预处理后沉积DLC,可以提高类金刚石薄膜的膜-基结合力、耐腐蚀性及生物相容性,是一种有效的医用钛合金表面改性方法,具有潜在的临床应用价值。

Preparation and properties of DLC deposited on the sandblasted titanium alloys

Objective Diamond-like carbon film (DLC) is produced on the surface of titanium alloy of different roughness by the method of plasma enhanced chemical vapor deposition (PECVD).We study the binding force,corrosion resistance and biological behaviour of DLC to explore whether this substrate surface preparation is an effective modification method for DLC.Methods We firstly prepare and produce titanium alloy plate of different roughness on the surface of titanium alloy sandblasted by Al2O3 with different particle sizes under the same condition,deposite DLC on its surface by PECVD.Then we characterize the physical and chemical performance of the five group samples by scanning electron microscope (SEM),X-ray photoelectron spectroscopy,Raman spectrometer and contact angle measurement instrument.Finally,we estimate the biological behaviour by MTT method and fluorescent staining.Results Depositing DLC after the sandblasting pretreatment to titanium alloy plate substrate,can remarkably improve the adhesion of DLC film and the substrate.In the study of corrosion resistance,depositing DLC can obviously promote the corrosion resistance of titanium alloy;the corrosion potentials of the depositing DLC film materials are equally greater than pure Ti alloy group in the positive direction.In the study of biology behavior,the cell proliferation condition of S60 is the best,significantly greater than S0 group (P < 0.05).Conclusions DLC deposited on the sandblasted titanium alloy substrate,can promote the adhesion of film-substrate,corrosion resistance and biocompatibility.This method can effectively modify the surface of medical titanium alloy,which has the potential value of clinical application.