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A Novel Micro-Displacement Sensor Based on Double Optical Fiber Probes Made through Photopolymer Materials
Authors:Fuzheng Zhang  Qijing Lin  Liangquan Zhu  Na Zhao  Feng Han  Libo Zhao  Zhuangde Jiang
Affiliation:1.State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China; (F.Z.); (L.Z.); (N.Z.); (F.H.); (L.Z.); (Z.J.);2.Collaborative Innovation Center of High-End Manufacturing Equipment, Xi’an Jiaotong University, Xi’an 710054, China;3.School of Mechanical and Manufacturing Engineering, Xiamen Institute of Technology, Xiamen 361021, China;4.Xi’an Jiaotong University Suzhou Institute, Suzhou 215123, China
Abstract:
In this paper, a novel micro-displacement sensor with double optical fiber probes is proposed and designed, which can realize the highly sensitive sensing of longitudinal or lateral micro-displacements. The optical fiber probes are made through photopolymer formulation, and the effects of reaction time and optical power on the growth length of the probe are illustrated. The relationship between light intensity and longitudinal micro-displacement is a power function in the range of 0–100 μm at room temperature with a correlation coefficient of 98.92%. For lateral micro-displacement, the sensitivity is −2.9697 dBm/μm in the range of 0–6 μm with a linear fit of 99.61%. In addition, the linear correlation coefficient decreases as the initial longitudinal distance increases, and the function of these correlation coefficients is also linear with a linearity of 96.14%. This sensor has a simple manufacturing process, low cost, high sensitivity, and fast response speed. It is suitable for harsh environments such as strong electromagnetic interference and corrosivity, and has a broad application prospect in the field of micro-displacement sensing.
Keywords:micro-displacement sensor   optical fiber probe   photopolymerization
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