Abstract: | In this study, correlation of cell proliferation with surface properties of the polymer-like carbon (PLC) films of different thicknesses prepared by radio-frequency plasma CVD are investigated. Four PLC samples were prepared via radio frequency plasma chemical vapor deposition on Si substrates. Each PLC film was analyzed using spectroscopic ellipsometry to determine its thickness, refractive index (n), and extinction coefficient (k); the thickness ranged from 29.0 to 356.5 nm. Based on their n–k plots, all the samples were classified as PLC-type films. The biological response of the PLC films was evaluated in vitro using a cell culture. The samples with relatively thick PLC films (>300 nm) exhibited stronger cell proliferation properties than those with thinner films. Moreover, the results of the surface analysis showed no significant differences in the surface composition of those PLC samples, as analyzed using X-ray photoelectron spectroscopy, but that as the PLC films became thicker, their surfaces became rougher on the nanoscale and their wettability improved. Overall, this study showed that careful control of the film growth of PLC films, which affects their surface properties, is essential for their use in bio-interface applications. |