| 化学气相合成AIN超细粒子过程模型研究 |
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| 引用本文： | 李春忠,胡黎明,姚光辉,陈敏恒.化学气相合成AIN超细粒子过程模型研究[J].医学教育探索,1992(5). |
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| 作者姓名： | 李春忠 胡黎明 姚光辉 陈敏恒 |
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| 作者单位： | 华东化工学院技术化学物理研究室
(李春忠，胡黎明，姚光辉)，华东化工学院技术化学物理研究室(陈敏恒) |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 基于化学气相(CVD)合成超细粒子过程的反应、成核、生长和凝并,考虑CVD反应器中的轴向温度分布,建立了CVD反应器中描述超细粒子粒度及分布的一维过程模型。针对AlCl_3-NH_3-N_2体系化学气相合成AlN超细粒子的过程,研究了AlN粒子形成过程特征和操作参数对其粒度及分布的影响。CVD反应器中的轴向温度分布严重影响AlN粒子合成过程中的化学反应速率、成核速率和生长速率;AlN超细粒子的粒度随AlCl_3浓度的减小和总流量的增加而减小,其粒度分布宽度则随总流量的增加而增大。
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| 关 键 词： | 模型 合成过程 粒径分布 温度分布 化学气相淀积 氮化铝 超细粒子 |
Modelling Study of AlN UFP Synthesis Process by Chemical Vapor Reaction |
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| Li Chunzhong,Ha Liming,Yao Guanghui Chen Minheng.Modelling Study of AlN UFP Synthesis Process by Chemical Vapor Reaction[J].Researches in Medical Education,1992(5). |
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| Authors: | Li Chunzhong Ha Liming Yao Guanghui Chen Minheng |
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| Abstract: | Considering the axial temperature profile in CVD reactor, and based on the chemical reaction, nucleation, growth and coagulation of AlN UFP synthesis process by chemical vapor reaction, a one dimentional process model of particle size and distribution was established. To the AlCl_3-NH_3-N_2 system, the process properties of AlN particle formation and the effects of prosess parameters on AlN particle size and distribution were studied. The chemical reaction rate, nucleation rate and growth rate were strongly influenced by the axial temperature profile. The AlN particle size decrased with deceasing of AlCl_3 concentration and incrasing of total flow rate, and the AlN particle size distribution increased with increasing of total flow rate. |
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| Keywords: | modelling synthesis process particle size distribution temperature distribution chemical vapor deposition aluminum nitride ultrafine particles |
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